Scanning electron microscopy (SEM and EDX)
The Zeiss
Gemini 450 SEM has a field emitter and is very flexible in current
and voltage (500 eV - 30 keV). The elemental composition of the samples is analyzed by an Oxford Instruments UltimMax 65 EDX detector. For sample preparation an argon plasma sputtering device (Au, C, etc.) and a Baltzers metal evaporator (Au, Pt, etc.) are available. |
Secondary electron (SE) picture |
Back scattering electron (BSE) picture COMPO |
Back scattering electron (BSE) picture TOPO |