The Zeiss
Gemini 450 SEM has a field emitter and is very flexible in current
and voltage (500 eV - 30 keV).
Detectors for SE, BSE, in-lens SE and BSE, and STEM offer various
imaging options. The resolution is better than 1 nm.
The elemental composition of the samples is analyzed by an Oxford Instruments UltimMax 65 EDX detector.
For sample preparation an argon plasma sputtering device (Au, C, etc.) and a Baltzers metal evaporator (Au, Pt, etc.) are available.
